CHARGED PARTICLE BEAM EXPOSURE METHOD,申请号EP19890310807-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM EXPOSURE METHOD
摘要
申请公布号	EP0366367(A3)	申请公布日期	1991.02.06
申请号	EP19890310807	申请日期	1989.10.20
申请人	FUJITSU LIMITED	发明人	TAKAHASHI, YASUSHI
分类号	H01L21/30;G03F7/20;H01J37/317;H01L21/027;(IPC1-7):G03F7/20	主分类号	H01L21/30
代理机构		代理人
主权项
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