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发明名称
TEMPERATURE CONTROLLING METHOD
摘要
申请公布号
JPH0328376(A)
申请公布日期
1991.02.06
申请号
JP19890161202
申请日期
1989.06.23
申请人
SUMITOMO METAL IND LTD
发明人
GOTO KATSUFUMI
分类号
C30B25/16;C23C16/44;C23C16/46;C23C16/52;H01L21/205;H01L21/31
主分类号
C30B25/16
代理机构
代理人
主权项
地址
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