| 摘要 |
PURPOSE:To obtain an accurate analytical result by measuring characteristic X-ray intensity using the optimum acceleration voltage of exciting electron beam at every element and performing ZAF correcting calculation using said acceleration voltage. CONSTITUTION:The min. exciting electron beam acceleration voltage of an element and actual exciting electron beam acceleration voltage are contained in ZAF correcting operation as arithmetic factors. Then, the actual exciting electron beam acceleration voltage is set to the optimum value at every component element. The min. exciting electron beam acceleration voltage is a constant dependent upon an element. Since the X-ray intensity of each component is measured at each optimum exciting electron beam acceleration voltage and also used in ZAT correcting calculation, ZAF correction operation is necessarily converged to an actual concn. value. By this method, an accurate analytical result can be obtained. |
