| 摘要 |
PURPOSE:To enable the boundary between different matters projected by a scanning electron microscope to be accurately easily detected by judging the difference in the brightness of the pictures with high precision. CONSTITUTION:A scanning electron ray 2 is irradiated along the irradiation area of a measured subject 1 while reciprocating given times within a given distance. Thus, the scanning electron ray 2 is scanned according to the function represented by x=vt+deltacosomegat. The positional change rate of the intensity of the secondary electron ray can be given by subjecting the wave form (x) indicated in the figure to synchronizing detection with the frequency of the scanning electron ray 2. From the result given by subjecting the wave form (x) of the secondary ray, which is obtained by irradiating the scanning electron ray 2 while vibrating it, to synchronizing detection, a step-like wave form (x') from which the difference in the brightness of the pictures can be clearly judged can be obtained. |
