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发明名称
PRODUCTION OF THIN FILM
摘要
申请公布号
JPH0323227(A)
申请公布日期
1991.01.31
申请号
JP19890154522
申请日期
1989.06.19
申请人
IDEMITSU KOSAN CO LTD
发明人
HARIMA YUTAKA;YAMASHITA KAZUO;YOKOYAMA SEIICHIRO
分类号
C01G49/00;C07F17/02;C09K3/00
主分类号
C01G49/00
代理机构
代理人
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