| 摘要 |
PURPOSE:To appropriately carry out compensation of necessary exposing time for pellicle which is pasted together to a photomask by pasting a bar code onto the pellicle frame which shows the class of pellicle. CONSTITUTION:The bar code 1 is pasted onto the pellicle frame 10 of the photo mask 11. Then the mask 11 is loaded on the prescribed position of the projecting exposure device, the bar code 1 is read by activating a bar code reading sensor part 2 of the device, and correct exposure is carried out utilizing exposure timing data compensated by an exposing timing compensating value which is stored within an exposing timing controlling device 5 based on the read out class code of pellicle. In this way, the exposing timing of the mask, which is various types of pellicle pasted together, can be automatically compensated. |
