| 摘要 |
PURPOSE:To prevent the decrease of the breakdown strength between trenches by forming a charge-storage electrode having an electric connection to an element region through an opening. CONSTITUTION:At the upper side of a trench 3 having an SiO2 thin film 4 inside, an opening is made in the SiO2 thin film 4 only in the direction of its linking to the element region in the periphery of the trench 3, and a charge- storage electrode 10 made from poly-Si and having an electric connection with the element region through the opening is made. Accordingly, the upper part of the poly-Si linking to a LOCOS 8 is masked with an oxide film 11, and only the direction of its linking to the element region makes a contact section. And, this prevents the decrease of the breakdown strength between trenches. |
