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发明名称
FORMATION OF FERROELECTRIC THIN FILM
摘要
申请公布号
JPH0319373(A)
申请公布日期
1991.01.28
申请号
JP19890153997
申请日期
1989.06.16
申请人
SEIKO EPSON CORP
发明人
TAKENAKA KAZUHIRO
分类号
H01L21/8247;C23C14/34;H01L21/822;H01L21/8246;H01L27/04;H01L27/105;H01L29/788;H01L29/792
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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