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发明名称
PRODUCTION OF THIN FILM SUPERCONDUCTOR
摘要
申请公布号
JPH0317276(A)
申请公布日期
1991.01.25
申请号
JP19890151842
申请日期
1989.06.14
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HAYASHI SHIGENORI;KAMATA TAKESHI;KITAGAWA MASATOSHI;HIRAO TAKASHI;WASA KIYOTAKA
分类号
C23C18/14;H01B12/06;H01B13/00;H01L39/24
主分类号
C23C18/14
代理机构
代理人
主权项
地址
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