摘要 |
PURPOSE:To uniformize the current distribution, to obtain an excellent switching characteristic and to prevent temperature rise in a semiconductor switch by arranging plural semiconductor switches connected in series and in parallel to the outer peripheral face of a cylinder composed of an insulator and providing a cooling chamber on a cylinder. CONSTITUTION:A serial/parallel circuit comprising FETs 8 is used as a semiconductor switch in place of a conventional thyratron switch. Plural FETs 8 are connected in series along an axial direction to the outer peripheral face of the cylinder 10 composed of the insulator, plural series circuits are provided in parallel, the drain terminal D of the FETs 8 at one terminal of each serial circuit is connected to a supporting ring 13 and the source terminals S of the FETs 8 of the other end are connected to a short-circuit ring 12. Moreover, connecting points between the drain terminals D and the source terminals S of each FET 8 are connected by plural lead wires 17 in the circumferential direction. The cylinder 11 composed of a conductor is arranged coaxially in the inside of the cylinder 10 arranged with the FETs 8 connected in series and in parallel and the feed back path of the current is formed by the cylinder 11. Furthermore, the temperature rise in the FET 8 is eliminated by making a coolant flow to a cooling chamber 20 between the cylinders 10 and 11. |