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发明名称
DRY ETCHING APPARATUS
摘要
申请公布号
JPH0316212(A)
申请公布日期
1991.01.24
申请号
JP19890151876
申请日期
1989.06.14
申请人
MATSUSHITA ELECTRON CORP
发明人
MASUMOTO TAKAHIDE
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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