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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0314227(A)
申请公布日期
1991.01.22
申请号
JP19890150938
申请日期
1989.06.13
申请人
SHARP CORP
发明人
INOUE RYOZO
分类号
C23C14/34;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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