| 摘要 |
<p>PURPOSE:To improve product sampling efficiency and to ensure product of predetermined purity by detecting quantity of gas recovered to a recovery tank from an adsorption column in a desorption process so that quantity of cleaning gas to be used in a cleaning process is controlled in response to the variation in quantity of said recovered gas. CONSTITUTION:Adsorption and separation of specific components is carried out by successively changing over an adsorption process wherein a mixed gas is introduced into adsorption columns 11b, 11c packed with adsorbents to cause specific components to be adsorbed thereon, a cleaning process wherein gas of the same kind as the specific components is introduced into the adsorption column as a cleaning gas to discharge gas other than the specific components therefrom, and a desorption process wherein the adsorbed specific components are recovered by discharging gas from the adsorption column. And quantity of gas recovered to a recovery tank 15 from the column in a desorption process is detected by means of a detector 30 to control quantity of cleaning gas to be used in a cleaning process in response to the variation in quantity of said recovered gas by means of a flow rate control mechanism 33. As a result, product sampling efficiency can be improved and also product of predetermined purity can be stably obtained.</p> |
