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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0310069(A)
申请公布日期
1991.01.17
申请号
JP19890142529
申请日期
1989.06.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SUZUKI NAOKI;HORI ATSUO;SAEKI KEIJI;MORI KAZUHIRO
分类号
C23C14/34;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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