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发明名称
METHOD OF PLASMA ETCHING
摘要
申请公布号
EP0151947(B1)
申请公布日期
1991.01.16
申请号
EP19850100405
申请日期
1985.01.17
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CHEN, LEE;KHOURY, HENRI ANTOINE;SEYMOUR, HARLAN RICHARDSON
分类号
H01L21/302;C23F4/00;H01J37/32;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
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