| 摘要 |
PURPOSE:To make adjustment work easy to reduce the number of parts to simplify constitution so as to accurately perform attitude control by adjusting a separating distance between a table and a board as the table is held horizontal with the use of compressed air. CONSTITUTION:When a magnetic fluid 8 is injected in a gap 13, a magnetic circuit is formed as shown by an arrow mark, and the fluid 8 is held on a table 2 to prevent the outflow of composed air in a compressed air inflow space 7. In this state, compressed air supplied into the space 7 from a plurality of air holes 3 is allowed to hold the inner pressure of the space 7 at a proper pressure while a pressure distribution acting on the back of the table 2 due to isotropic fluid is made uniform to hold the table 2 horizontal. In addition, during operation, a control part 15 is allowed to control the opening of a servo 5 so as to hold distance between the table 2 and a board 1 at a desired value, and the displacement of the table 2 from a standard position allows the control part 15 to control the opening of the servo 5 with the use of a detected signal of a displacement sensor 14 to adjust. Thereby, adjustment work of the estrangement distance becomes easy to detect a table position with the use of one displacement sensor. |
