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发明名称
MICROWAVE PLASMA TREATING APPARATUS
摘要
申请公布号
EP0343602(A3)
申请公布日期
1991.01.09
申请号
EP19890109283
申请日期
1989.05.23
申请人
CANON KABUSHIKI KAISHA
发明人
KAWAKAMI, SOICHIRO;KANAI, MASAHIRO;ARAI, TAKAYOSHI;MURAKAMI, TSUTOMU
分类号
B01J19/08;C23C16/27;C23C16/50;C23C16/511;C23F4/00;C30B29/04;H01J37/32;H01L21/205;H01L21/31;H05H1/46;(IPC1-7):H01J37/32
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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