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经营范围
发明名称
SPUTTERING METHOD
摘要
申请公布号
JPH032368(A)
申请公布日期
1991.01.08
申请号
JP19890133497
申请日期
1989.05.27
申请人
SONY CORP
发明人
KENMOTSU HIDENORI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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