摘要 |
PURPOSE:To improve the temperature characteristic of the resonance frequency of piezoelectric parts of the perpendicular slip oscillation mode by inclining the direction of the axis of polarization of a piezoelectric substrate to both of the longer-side direction and the shorter-side direction in the electrode forming face of the piezoelectric substrate. CONSTITUTION:A piezoelectric mother substrate 2 made of piezoelectric ceramics is formed to a rectangular parallelepiped and has a pair of first surfaces 6a facing each other, a pair of second surfaces 6b facing each other, and a pair of third surfaces 6c facing each other, and electrodes 7 for polarization are formed on the first surfaces 6a, and electrodes 9 for polarization are formed on the second surfaces 6b. The direction of the axis of polarization (indicated by an arrow) is inclined at theta to the longer-side direction of the piezoelectric substrate 1. Since the direction of the axis of polarization is inclined to both of the longer-side direction and the shorter-side direction in this manner, the direction of the axis of polarization is adjusted to obtain an arbitrary temperature characteristic. Thus, piezoelectric parts stable against the change of temperature are obtained. |