发明名称 Process for producing single crystal silicon carbide.
摘要 Single crystals of silicon carbide SiC can be produced by sublimation and partial decomposition of crystalline SiC powder as starting material and growth on a nucleus. According to the invention, for crystal growth an excess of silicon is established in the SiC powder used as starting material. This process gives pure single crystals.
申请公布号 EP0403887(A1) 申请公布日期 1990.12.27
申请号 EP19900110840 申请日期 1990.06.07
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 STEIN, RENE, DR.
分类号 C30B23/00;C30B29/36 主分类号 C30B23/00
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