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发明名称
PRODUCTION OF OXIDE SUPERCONDUCTOR THIN FILM
摘要
申请公布号
JPH02311306(A)
申请公布日期
1990.12.26
申请号
JP19890135138
申请日期
1989.05.29
申请人
TOSHIBA CORP
发明人
MIURA TADAO
分类号
C04B41/87;C01B13/14;C01G1/00;C01G3/00;C23C14/08;H01B12/06;H01B13/00;H01L39/24
主分类号
C04B41/87
代理机构
代理人
主权项
地址
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