| 摘要 |
PURPOSE:To form an oxide superconducting film having uniform thickness and characteristics by using a laser deposition process, passing an excimer laser beam through a traversing converging lens and depositing atoms or molecules scattered from a target on a basal substrate. CONSTITUTION:A target is irradiated with an excimer laser beam through a converging lens and the atoms and/or molecules scattered from the target are deposited on a basal substrate to form a superconducting film. The converging lens for transmitting the excimer laser beams is traversed in the above laser deposition process. The basal substrate is preferably a continuous flexible substrate made of a ceramic such as stabilized zirconia, alumina, yttria, silica or titania or a metallic substance such as platinum, gold, silver, aluminum, nickel, hastelloy, inconel, incoloyl or stainless steel. |
