APPARATUS FOR FORMING THIN FILM OF SEMICONDUCTOR SUBSTRATE,申请号JP19890128957-传众专利搜索

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发明名称	APPARATUS FOR FORMING THIN FILM OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH02308534(A)	申请公布日期	1990.12.21
申请号	JP19890128957	申请日期	1989.05.24
申请人	TOSHIBA CORP	发明人	OYABU MAKOTO
分类号	H01L21/205;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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