MAGNETRON SPUTTERING CATHODE,申请号JP19890127523-传众专利搜索

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发明名称	MAGNETRON SPUTTERING CATHODE
摘要
申请公布号	JPH02306522(A)	申请公布日期	1990.12.19
申请号	JP19890127523	申请日期	1989.05.20
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	ASANO HIDEFUMI;ASAHI MASAYOSHI;MICHIGAMI OSAMU
分类号	H01J23/04	主分类号	H01J23/04
代理机构		代理人
主权项
地址

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