LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE:To form switching elements with a simple stage of a relatively low temp. and to obtain the high-contrast device by using hard carbon films as the insulators of conductor-insulator-metal element and providing light shielding films in regions exclusive of the element regions. CONSTITUTION:The conductor-insulator-metal (MIM) element is constituted of a metallic layer connected to a lower electrode 3, an insulating film 4 and a metallic layer connected to upper electrode 5. The light shielding layers 7 are provided in the regions exclusive of the display regions of picture element electrodes 2. The insulating film 4 is formed of the hard carbon film which consists of carbon atoms and hydrogen atoms as essential structure forming elements and includes amorphous or fine crystals. Since this hard carbon film is formed by a vapor growth method, the control over a wide range by film forming conditions is possible. The switching elements are formed by the simple stage at the relatively low temp. in this way and the high-contrast device is obtd.