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发明名称
SUBSTRATE TRANSPORT MECHANISM
摘要
申请公布号
JPH02305738(A)
申请公布日期
1990.12.19
申请号
JP19890124175
申请日期
1989.05.19
申请人
HITACHI ELECTRON ENG CO LTD
发明人
IWAMA SATORU;HORIE NOBORU;ITO YASUHIRO;KOZUKA TOSHIYUKI;SUZUKI HIROSHI
分类号
B65H5/06;B65G49/07
主分类号
B65H5/06
代理机构
代理人
主权项
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