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发明名称
DISCHARGE APPARATUS
摘要
申请公布号
EP0173583(B1)
申请公布日期
1990.12.19
申请号
EP19850306186
申请日期
1985.08.30
申请人
ANELVA CORPORATION
发明人
KIM, KYUNGSHIK C/O ANELVA CORPORATION;WILKINSON, OWEN C/O ANELVA CORPORATION
分类号
C23C16/517;H01J37/32
主分类号
C23C16/517
代理机构
代理人
主权项
地址
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