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发明名称
摘要
申请公布号
JPH02146828(U)
申请公布日期
1990.12.13
申请号
JP19890053559U
申请日期
1989.05.10
申请人
发明人
分类号
H01L21/30;H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/30
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