| 摘要 |
PURPOSE: To prevent the formation of hair cracks in an insulating layer which is sealed by the envelope of a synthetic resin material by covering different conductor tracks to different levels with the insulating layers, so that the lowest point of the surface of the insulating layer can become higher in level than the highest point of the conductor tracks. CONSTITUTION: Different conductor tracks 3 and 6 at different levels are covered with an insulating layer 4, which is sealed by the envelope 5 of a synthetic resin material so that the lowest point of the surface 8 of the layer 4 can become higher in level than the highest point of the tracks 3 and 6. Hardness of the layer 4 is greater than that of the envelope 5 as well as than 20GPa such as a glass-filled epoxy resin. The layer 4 can be constituted of two sub- layers 21 and 22 of different compositions, and the material of a single layer 41 or the sub-layer 21 is selected out of silicon oxide, silicon nitride, and silicon oxynitride which are obtained from such silane compound as tetraethyl orthosilicate under an oxidizing condition. |
