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发明名称
摘要
申请公布号
JPH02146164(U)
申请公布日期
1990.12.12
申请号
JP19890053825U
申请日期
1989.05.10
申请人
发明人
分类号
C30B15/04;C30B15/36;H01L21/208;(IPC1-7):C30B15/36
主分类号
C30B15/04
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代理人
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