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发明名称
ETCHING OF GERMANIUM
摘要
申请公布号
JPH02298025(A)
申请公布日期
1990.12.10
申请号
JP19890119815
申请日期
1989.05.12
申请人
NEC CORP
发明人
KIMURA TORU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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