| 摘要 |
PURPOSE:To reproduce laser gas with optimum conditions and hence eliminate use of additional instruments for reduction of the installation cost by directly exhausting laser gas in a laser oscillator by a vacuum pump or circulating said laser gas through a gas reproducer. CONSTITUTION:When a laser oscillator 1 is exhausted, a solenoid valve 3 is opened, flow passages of changeover valves 11, 17 are switched to an X flow passage, and solenoid valves 7, 13 are closed. With this situation, once two stage vacuum pumps 5A, 5B are actuated, laser gas is led to the flow passage 4 of th valve 11 after passing thorugh the vacuum pump 5A and a branch tube 9, and exhausted through the vacuum pump 5B and the flow passage X of the valve 17. In reproduction of the laser gas, the valves 3, 7 are opened and the vacuum pump 5A is actuated for evacuation, while the vacuum pump 5B performs reproduction. Namely, the flow passages of the valves 11, 17 are switched to flow passages Y, and the valve 13 is opened to actuate the pump 5B. Hereby, the laser gas is permitted to pass thorugh the valve 13 and reproduced in a gas reproducer 15 and returned into the oscillator 1 after passing through the flow passages Y of the valves 11, 17. |
