| 摘要 |
PURPOSE:To make an apparatus compact by providing a light transmitting part at a rear mirror, detecting laser light which is taken out of the light transmitting part by a photoelectric method, and monitoring the intensity of the laser light which is osciallated in a laser device. CONSTITUTION:Laser light is generated by discharge at a high voltage between electrodes 1c and 1d in an excimer laser device. The laser light is reflected and reciprocated between a front mirror 2 and a rear mirror 3 several times. Thereafter, the laser light is transformed into excimer laser light, and pulse oscillation is generated. At this time, part of the excimer laser light which is reflected from the mirror 3 is transmitted through a pinhole 3a and inputted into a light-amount monitor system 4. The intensity of the laser light which is inputted into the monitor system 4 is approximately proportional to the intensity of the laser light which is oscillated in the excimer laser device. Therefore, the amount of the excimer laser light is detected based on the photoelectric signal corresponding to the amount of the received light in the monitor system 4. As a result, the monitor system can monitor the laser output from the excimer laser device all the time. |
