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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02296340(A)
申请公布日期
1990.12.06
申请号
JP19890117904
申请日期
1989.05.11
申请人
MITSUBISHI ELECTRIC CORP
发明人
OBAYASHI YOSHIKAZU
分类号
H01L29/78;H01L21/336
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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