摘要 |
PURPOSE:To compact an element and to improve its durability, by providing a heater wire at the distance from electrodes and lead wires on one side of a substrate consisting of a solid electrolyte. CONSTITUTION:Platinum electrodes 2,3 are formed respectively in the center of both surfaces end parts of a sensor substrate 1 consisting of a solid electrolyte of zirconia stabilized with yttrium oxide etc., and the electrodes 2,3 are provided in extension with lead wires 4,5 consisting of platinum which are brought into contact with the end parts of the electrodes. A heater wire 10 consisting of tungsten is formed in the peripheral part of the one side of the substrate 1 at a distance from the electrodes 2,3 and the lead wires 4,5. By such a constitution, an element is compacted as a whole and a heat loss from the heater wires is reduced and heat efficiency is improved and a sensor becomes strong to an oscillating load. |