发明名称 CASE FOR HOUSING MASK
摘要 PURPOSE:To prevent dusk stuck on the case inside from sticking to the surface of a mask housed in the case by putting the case inside in a sticky state. CONSTITUTION:A case consists of synthetic resin, an adhesive is applied to the inside of the case opposing to the surface of the mask 11 for being put in a sticky state. That is, by putting the case inside opposing to the surface of the mask 11 in the sticky state, dust stuck to the case inside is prevented from separating away due to the opening and shutting operation of the case and external vibration. Thereby, a pattern defect to be caused by resticking of dust after separating away to the surface of the mask 11 housed inside the case is reduced.
申请公布号 JPH02288322(A) 申请公布日期 1990.11.28
申请号 JP19890109645 申请日期 1989.04.28
申请人 SEIKO EPSON CORP 发明人 USHIYAMA FUMIAKI
分类号 H01L21/673;H01L21/027;H01L21/30;H01L21/68 主分类号 H01L21/673
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