| 摘要 |
PURPOSE:To allow the prevention of transfer from normal glow discharge to arc discharge, by connecting current adjustment elements respectively between a plularity of pin electrodes and power source in series. CONSTITUTION:Laser medium flows in a discharging part 20 as high speed air current with a bar electrode 21 and a plurality of pin electrodes 22 opposed thereto arranged via a required discharge clearance. Resistors 23, transistors 24, 25 as current adjustment elements and the second resistors 26 are connected in series to each pin electrode 22 with the transistors connected to a control power source 27. When current is going to concentrate on a pin electrode, the transistors 25 come into a conductive state without the flow of the base current of the transistors 24 to restrict the current for the pin electrode on which current is going to concentrate. Therefore, the transfer from glow discharge to arc discharge is prevented. |
