| 摘要 |
<p>PURPOSE:To remove an article to be attracted in a short period of time by applying an attracting voltage or a high potential voltage in a reverse polarity at the time of removing the article to be attracted. CONSTITUTION:An electrostatic chuck 1 is composed of a pair of pectinated electrodes 3-4 in a sheet 2 made of a dielectric material. A voltage applying apparatus 6 has a voltage applying control circuit 11 made of a MPU 19, etc., a programmable voltage source 14, switch means 15, etc. Erasing voltage value setting means 17 and applying time setting means 18 are provided, and a residual attraction force erasing voltage of high potential is applied in reverse polarity to the attracting voltage when a silicon wafer is removed.</p> |
