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发明名称
RESIST APPLICATOR
摘要
申请公布号
JPH02284414(A)
申请公布日期
1990.11.21
申请号
JP19890106248
申请日期
1989.04.25
申请人
NEC CORP
发明人
HOSAKA KOJI
分类号
B05C11/08;B05C11/10;H01L21/027
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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