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发明名称
MANUFACTURE OF THIN FILM TRANSISTOR
摘要
申请公布号
JPH02281633(A)
申请公布日期
1990.11.19
申请号
JP19890103199
申请日期
1989.04.21
申请人
CASIO COMPUT CO LTD
发明人
TOSAKA HISAO
分类号
H01L21/302;H01L21/3065;H01L21/336;H01L27/12;H01L29/78;H01L29/786
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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