发明名称 Single crystal pulling - with dispenser rod tapered for seed by induction heating
摘要 <p>Monocrystalline silicon semiconductor material is produced by successive inductive heating, without a crucible, of a rotating rod with a small seed crystal at the end. Before the latter is fused to the dispenser rod, the rod is chamfered at its end to a truncated cone by rotating its end at an angle relative to a hairpin induction coil and melting off the excess material. When finished, the cross-sectional ratio of seed to dispenser rod is a max of 1:5.</p>
申请公布号 DE2128494(A1) 申请公布日期 1972.12.14
申请号 DE19712128494 申请日期 1971.06.08
申请人 SIEMENS AG 发明人
分类号 C30B13/34;(IPC1-7):01J17/08 主分类号 C30B13/34
代理机构 代理人
主权项
地址