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发明名称
FIELD IONIZATION TYPE ION SOURCE AND ION BEAM EQUIPPED WITH THE SAME ION SOURCE
摘要
申请公布号
JPH02278810(A)
申请公布日期
1990.11.15
申请号
JP19890100857
申请日期
1989.04.20
申请人
FUJITSU LTD
发明人
HORIUCHI TAKASHI;ITAKURA TORU
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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