发明名称 |
Semiconductor integrated circuit device of multilayer interconnection structure |
摘要 |
A semiconductor integrated circuit device of multilayer interconnection structure includes a pad (34) formed of a multilayer interconnection layer (52, 54). The power source pad (34) is connected to a power source interconnection layer (33) via a lead-out interconnection layer (35) which is formed of the same multilayer interconnection layer (52, 54) as that used to form the power source pad (34). |
申请公布号 |
US4970572(A) |
申请公布日期 |
1990.11.13 |
申请号 |
US19890318791 |
申请日期 |
1989.03.03 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KATO, TOSHIYA;ENKAKU, MOTOHIRO |
分类号 |
H01L23/52;H01L21/3205;H01L23/522;H01L23/528 |
主分类号 |
H01L23/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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