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发明名称
BUBBLER FOR ORGANIC METAL AND MO-CVD APPARATUS
摘要
申请公布号
JPH02277229(A)
申请公布日期
1990.11.13
申请号
JP19890099081
申请日期
1989.04.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAGAI YUTAKA
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
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地址
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