| 摘要 |
PURPOSE:To shift a transfer body by a sufficient transport force by interference- composing the deflection vibrations in the transport direction and the direction crossing at right angle with the transport direction of the first and second vibrating plates in pairs and generating an elliptical movement by an arbitrary mass point on the top edge surface of a displacement magnifying mechanism installed onto a vibrating plate. CONSTITUTION:The first and second vibrating plates 8 and 9 which are oppositely arranged are two-phase-driven by two pairs of piezoelectric elements (11A, 18A) and (11B, 18B), and a Bm mode deflection vibration in the transport direction and a Bn mode deflection vibration in the direction crossing at right angle with the transport direction are generated on each vibrating plate. Therefore, when the displacement magnifying mechanisms (15A, 15B) and (17A, 17B) installed on the both vibrating plates are swung in the transport direction, and at the same time, approached and separated. Further, the time phase difference of the voltage applied onto the piezoelectric elements in two-phase-drive is made different by 90 deg., and the both deflection vibrations are interfered and composed, and an arbitrary mass point at the top edge surface of the displacement magnifying mechanism is allowed to perform an elliptical movement. Therefore, a transfer body 1 can be shifted by a sufficient transport force. |
