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发明名称
DRY ETCHING
摘要
申请公布号
JPH02277234(A)
申请公布日期
1990.11.13
申请号
JP19890097511
申请日期
1989.04.19
申请人
TOSHIBA CORP
发明人
SEKINE MAKOTO;OKANO HARUO
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
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