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发明名称
PROBE BOARD
摘要
申请公布号
JPH02275366(A)
申请公布日期
1990.11.09
申请号
JP19890096135
申请日期
1989.04.14
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMANO TAKESHI
分类号
G01R31/26;G01R1/073;H01L31/02
主分类号
G01R31/26
代理机构
代理人
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