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发明名称
ROTARY COATING APPARATUS
摘要
申请公布号
JPH02273569(A)
申请公布日期
1990.11.08
申请号
JP19890091852
申请日期
1989.04.13
申请人
OKI ELECTRIC IND CO LTD
发明人
FUJITA YOSHIMOTO;HIGUCHI TOMIO;KOBAYASHI AKIYOSHI
分类号
B05C11/08;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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