EDELMETALL-POLYMER-VERBUNDMATERIALIEN UND DARAUS HERGESTELLTE FLEXIBLE DUENNFILMLEITER

摘要

A composite article is prepared as a polymeric support having a coating of noble metal deposited on at least one surface thereof, the coating exhibiting suitable peel force for high performance applications such as the preparation of an electrode, such as a biocompatible, flexible, thin-film microelectrode for use in a multiconductor stimulation array eg a cochlear implant electrode. The coating exhibits a peel force of at least about 0.05 kg/mm width after 24 hour boiling saline treatment. The composite article can be prepared by pretreating at least one surface of the support by sputter etching, followed by sputter-depositing a noble metal on the pretreated surface in order to form the coating of noble metal. The coating further exhibits a sheet existence of about 30 ohms per square or less before boiling saline treatment, and sheet resistance of about 9 ohms per square or less after 24 hour boiling saline treatment. The polymeric support is preferably a polyimide, a polyethylene terephthalate or a polyester-polyether block copolymer and noble metal may be gold, iridium, palladium, platinum, rhodium or rutherium. Fig 5 illustrates a perspective view of a stage in the construction of a single sided electrode array in which the conduction paths 40 are fashioned on a polymeric support by using photolithographic methods. <IMAGE>