| 摘要 |
<p>PURPOSE:To enable wide-range device designing and to obtain a high-capacity liquid crystal display device which uses an MIM element having small variance in element characteristics by providing the MIM element which uses a hard carbon film as an insulating film in a cut part formed in a lead electrode. CONSTITUTION:A conductive thin film of a transparent conductor is formed on a transparent substrate 1 and etched in specific pattern to form a lead electrode 2. The lead electrode 2 is in a striped shape and a cut is formed partially in it. Then the hard carbon film is formed as the insulating film 3 and formed in specific pattern. Then an inter-layer insulating layer 4 is formed and then a picture element electrode 5 is formed of a transparent conductor lastly. Consequently, the MIM element is provided in the cut part of the lead electrode, so an element part does not project, the wide-range device designing is enabled by using the insulating film (hard carbon film) which is superior in film controllability and mechanical strength and has a low dielectric constant, and the liquid crystal display device which has small variance in element characteristics and a high aperture ratio can be obtained.</p> |
